Adaptive control for micro/nano positioning system driven by piezo electric actuator

2015 ◽  
Author(s):  
Xinkai Chen ◽  
Shengjun Wen ◽  
Dongyun Wang ◽  
Chun-Yi Su
Keyword(s):  
Adaptive Control ◽  
Positioning System ◽  
Electric Actuator ◽  
Piezo Electric

A Study on Optical Piezo-Electric Actuator (Response Experiments by U.V. Beam and Photo Response Model)

1992 ◽  
Vol 4 (4) ◽  
pp. 321-329 ◽  
Author(s):  
Shinobu Hattori ◽  
◽  
Toshio Fukuda ◽  
Shigenobu Nagamori ◽  
Keyword(s):  
Response Time ◽  
Light Beam ◽  
Thermal Deformation ◽  
Response Magnitude ◽  
Response Model ◽  
Electric Actuator ◽  
Photo Response ◽  
Piezo Electric

In this paper, we propose a photo response model of the optical piezo-electro actuator, which reacts by light beam. Based on response experiments by U.V. beam, the response in this model is constituted with three effects: 1) photostrictive effect; 2) pyroelectro effect; 3) thermal deformation. Those effects are different in response magnitude and response time each other; influenced by the characteristics of the light beam. In consequence, it is possible that a photo response is controlled by changing characteristics of light beam. As a whole, results of the simulations of this model agree with those of the experiments.

scholarly journals Development of inchwarm for STM using piezo-electric actuator.

1995 ◽  
Vol 7 (1) ◽  
pp. 24
Author(s):  
Yasurou Matsuo ◽  
Kenji Koizumi ◽  
Tsunenori Suzuki
Keyword(s):  
Electric Actuator ◽  
Piezo Electric
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