A MEMS inertia sensor with Brownian noise of below 50 nG/√Hz by multi-layer metal technology
2015 ◽
Vol 135
(4)
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pp. 142-143
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2013 ◽
Vol 35
(2)
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pp. 269-276
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2018 ◽
Vol 29
(5)
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pp. 1491-1502
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1990 ◽
Vol 88
(3)
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pp. 1669-1669
Keyword(s):
2014 ◽
Vol 2014.52
(0)
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pp. _513-1_-_513-3_
2002 ◽
Vol 39
(4)
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pp. 882-888
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Keyword(s):
Keyword(s):
2016 ◽
Vol 15
(1)
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pp. 625-654
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