Soft x-ray (0.2

2004 ◽  
Vol 75 (10) ◽  
pp. 4026-4028 ◽  
Author(s):  
B. H. Failor ◽  
N. Qi ◽  
J. S. Levine ◽  
H. Sze ◽  
E. M. Gullickson
Keyword(s):  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Radiation Sources ◽  
Z Pinch

Experimental study of an argon-hydrogen Z pinch plasma radiation source

2002 ◽  
Vol 30 (2) ◽  
pp. 498-511 ◽  
Author(s):  
A.V. Shishlov ◽  
R.B. Baksht ◽  
A.Yu. Labetsky ◽  
V.I. Oreshkin ◽  
A.G. Rousskikh ◽  
...  
Keyword(s):  
Experimental Study ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Z Pinch

Characteristics of the spherical pinch plasma radiation source (SPX II) for x-ray, UV, and deep-UV lithography

1993 ◽  
Author(s):  
Shridar Aithal ◽  
Emilio Panarella ◽  
M. Lamari ◽  
B. Hilko ◽  
Robert B. McIntosh
Keyword(s):  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Pinch Plasma ◽  
Uv Lithography ◽  
Deep Uv ◽  
Spherical Pinch

An estimation of Z-pinch plasma radiation source for EUVL by using artificial neural networks

2006 ◽  
Author(s):  
C. H. Zhang ◽  
C. C. Ji ◽  
J. G. Shi ◽  
S. Katsuki ◽  
A. Kimura ◽  
...  
Keyword(s):  
Neural Networks ◽  
Artificial Neural Networks ◽  
Radiation Source ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Artificial Neural ◽  
Z Pinch

scholarly journals Study on W wire array Z pinch plasma radiation at Qiangguang-Ⅰ facility

2006 ◽  
Vol 55 (11) ◽  
pp. 5917
Author(s):  
Qiu Ai-Ci ◽  
Kuai Bin ◽  
Zeng Zheng-Zhong ◽  
Wang Wen-Sheng ◽  
Qiu Meng-Tong ◽  
...  
Keyword(s):  
Wire Array ◽  
Plasma Radiation ◽  
Pinch Plasma ◽  
Z Pinch

Characterization of multilayer x-ray mirrors for the λ ⋍ 19 nm range using a laser-plasma radiation source

1993 ◽  
Vol 23 (1) ◽  
pp. 76-80 ◽  
Author(s):  
I A Zhitnik ◽  
S V Kuzin ◽  
M M Mitropol'skiĭ ◽  
Evgenii N Ragozin ◽  
V A Slemzin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Radiation Source ◽  
Plasma Radiation ◽  
X Ray ◽  
Nm Range

Elliptically Bent Crystal Spectrometer for Z-Pinch Plasma X-Ray

2009 ◽  
Vol 36 (1) ◽  
pp. 115-118
Author(s):  
王洪建 Wang Hongjian ◽  
肖沙里 Xiao Shali ◽  
施军 Shi Jun ◽  
黄显宾 Huang Xianbin ◽  
杨礼兵 Yang Libing ◽  
...  
Keyword(s):  
Crystal Spectrometer ◽  
X Ray ◽  
Pinch Plasma ◽  
Bent Crystal ◽  
Z Pinch
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