Ion beam charcteristics of liquid metal ion source with a suppressor for the focused ion beam system

2012 ◽  
Author(s):  
Booki Min ◽  
Hyun Joo Oh ◽  
Seung Oun Kang ◽  
Eun Ha Choi
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Beam System

Energy spread of boron palladium liquid metal ion source and characterization with focused ion beam system

1995 ◽  
Vol 66 (6) ◽  
pp. 3459-3464
Author(s):  
Ronnie Higuchi‐Rusli
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Energy Spread ◽  
Beam System

Beam interactions in a focused ion beam system with a liquid metal ion source

1994 ◽  
Vol 23 (1-4) ◽  
pp. 107-110 ◽  
Author(s):  
P.W.H. de Jager ◽  
L.J. Vijgen
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Beam System

A Compact Nuclear Microprobe With a Liquid Metal Ion Source and a Toroidal Analyzer

1992 ◽  
Vol 295 ◽  
Author(s):  
Mikio Takai ◽  
Ryou Mimura ◽  
Hiroshi Sawaragi ◽  
Ryuso Aihara
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Vacuum ◽  
Spot Size ◽  
Ion Source ◽  
Ultra High Vacuum ◽  
Atomic Resolution ◽  
Nuclear Microprobe

AbstractA nondestructive three-dimensional RBS/channeling analysis system with an atomic resolution has been designed and is being constructed in Osaka University for analysis of nanostructured surfaces and interfaces. An ultra high-vacuum sample-chamber with a threeaxis goniometer and a toroidal electrostatic analyzer for medium energy ion scattering (MEIS) was combined with a short acceleration column for a focused ion beam. A liquid metal ion source (LMIS) for light metal ions such as Li+ or Be+ was mounted on the short column.A minimum beam spot-size of about 10 nm with a current of 10 pA is estimated by optical property calculation for 200 keV Li+ LMIS. An energy resolution of 4 × 10-3 (AE/E) for the toroidal analyzer gives rise to atomic resolution in RBS spectra for Si and GaAs. This system seems feasible for atomic level analysis of localized crystalline/disorder structures and surfaces.

Design of a 100 kV, high resolution focused ion beam column with a liquid metal ion source

1985 ◽  
Vol 3 (1-4) ◽  
pp. 161-164 ◽  
Author(s):  
Jon Orloff ◽  
Pierre Sudraud
Keyword(s):  
High Resolution ◽  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source

Characterization of phosphorus liquid‐metal ion source as a dopant source in focused ion beam systems

1988 ◽  
Vol 63 (3) ◽  
pp. 603-610 ◽  
Author(s):  
R. H. Higuchi‐Rusli ◽  
J. C. Corelli
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Dopant Source
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