Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4
Keyword(s):
2014 ◽
Vol 23
(6)
◽
pp. 064003
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1988 ◽
Vol 6
(1)
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pp. 81-85
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Keyword(s):
1995 ◽
Vol 23
(9)
◽
pp. 573-580
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