Ex-situ Hydrogenation of Sputtered Transparent Conductive Oxide layers by Plasma Immersion Ion Implantation
2018 ◽
Vol 8
(6)
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pp. 1847-1851
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Keyword(s):
2012 ◽
Vol 51
(10S)
◽
pp. 10NB01
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1988 ◽
Vol 27
(Part 1, No. 6)
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pp. 880-882
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Keyword(s):
2017 ◽
Vol 26
(1)
◽
pp. 13-23
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2003 ◽
Vol 174-175
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pp. 591-596
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Keyword(s):