Structure and properties of titanium oxide layers prepared by metal plasma immersion ion implantation and deposition

2003 ◽  
Vol 174-175 ◽  
pp. 591-596 ◽  
Author(s):  
I Tsyganov ◽  
M.F Maitz ◽  
E Wieser ◽  
F Prokert ◽  
E Richter ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Titanium Oxide ◽  
Structure And Properties ◽  
Oxide Layers ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Raman study of titanium oxide layers produced with plasma immersion ion implantation

2000 ◽  
Vol 125 (1-3) ◽  
pp. 84-88 ◽  
Author(s):  
S. Mändl ◽  
G. Thorwarth ◽  
M. Schreck ◽  
B. Stritzker ◽  
B. Rauschenbach
Keyword(s):  
Ion Implantation ◽  
Titanium Oxide ◽  
Oxide Layers ◽  
Raman Study ◽  
Plasma Immersion Ion Implantation

Structure and properties of silver-containing a-C(H) films deposited by plasma immersion ion implantation

2008 ◽  
Vol 202 (15) ◽  
pp. 3675-3682 ◽  
Author(s):  
J.L. Endrino ◽  
R. Escobar Galindo ◽  
H.-S. Zhang ◽  
M. Allen ◽  
R. Gago ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Structure And Properties ◽  
Plasma Immersion Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation
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