Ex situ phosphorus doped polysilicon films by plasma immersion ion implantation (PIII): Controlling and simplifying passivated contacts integration

Mapping Intimacies ◽

10.1063/1.5123848 ◽

2019 ◽

Author(s):

Antoine Veau ◽

Thibaut Desrues ◽

Audrey Morisset ◽

Frank Torregrosa ◽

Laurent Roux ◽

...

Keyword(s):

Ion Implantation ◽

Ex Situ ◽

Polysilicon Films ◽

Plasma Immersion Ion Implantation ◽

Phosphorus Doped

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Characteristics of phosphorus-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII and D)

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.09.026 ◽

2007 ◽

Vol 201 (15) ◽

pp. 6643-6646 ◽

Author(s):

S.C.H. Kwok ◽

G.J. Wan ◽

J.P.Y. Ho ◽

P.K. Chu ◽

M.M.M. Bilek ◽

...

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation ◽

Phosphorus Doped

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Ex-situ Hydrogenation of Sputtered Transparent Conductive Oxide layers by Plasma Immersion Ion Implantation

2020 47th IEEE Photovoltaic Specialists Conference (PVSC) ◽

10.1109/pvsc45281.2020.9300693 ◽

2020 ◽

Author(s):

Charles Seron ◽

Thibaut Desrues ◽

Camille Oliveau ◽

Quentin Rafhay ◽

Frank Torregrosa ◽

...

Keyword(s):

Ion Implantation ◽

Transparent Conductive Oxide ◽

Ex Situ ◽

Oxide Layers ◽

Conductive Oxide ◽

Plasma Immersion Ion Implantation

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Biocompatibility of calcium and phosphorus doped diamond-like carbon thin films synthesized by plasma immersion ion implantation and deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2005.10.062 ◽

2006 ◽

Vol 15 (4-8) ◽

pp. 893-897 ◽

Author(s):

S.C.H. Kwok ◽

P.C.T. Ha ◽

D.R. McKenzie ◽

M.M.M. Bilek ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Diamond Like Carbon ◽

Calcium And Phosphorus ◽

Plasma Immersion Ion Implantation ◽

Carbon Thin Films ◽

Phosphorus Doped

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Non-conventional high voltage pulsers for advanced plasma immersion ion implantation

10.1063/1.1374892 ◽

2001 ◽

Author(s):

J. O. Rossi

Keyword(s):

Ion Implantation ◽

High Voltage ◽

Plasma Immersion Ion Implantation

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The effect of plasma immersion ion implantation of Ne+ or Ar+ or Kr+ on the forming voltage of the resistive switching in the structure Ni/Pt/HfO2(10nm)/TaN(5nm)/TiN

Journal of Physics Conference Series ◽

10.1088/1742-6596/1695/1/012009 ◽

2020 ◽

Vol 1695 ◽

pp. 012009

Author(s):

O O Permyakova ◽

A V Miakonkikh ◽

K V Rudenko ◽

A E Rogozhin

Keyword(s):

Ion Implantation ◽

Resistive Switching ◽

Plasma Immersion Ion Implantation

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Correction to “Sub-5 nm Nanodiamonds Fabricated by Plasma Immersion Ion Implantation as Fluorescent Probes”

ACS Applied Nano Materials ◽

10.1021/acsanm.1c01684 ◽

2021 ◽

Author(s):

Sung Ju Han ◽

Min Seo ◽

Min Gyeong Cho ◽

Young-Wan Kwon ◽

Sang-Ho Lim ◽

...

Keyword(s):

Ion Implantation ◽

Fluorescent Probes ◽

Plasma Immersion Ion Implantation

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TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.09.120 ◽

2007 ◽

Vol 201 (15) ◽

pp. 6615-6618 ◽

Author(s):

Tao Sun ◽

Langping Wang ◽

Yonghao Yu ◽

Yuhang Wang ◽

Xiaofeng Wang ◽

...

Keyword(s):

Ion Implantation ◽

Bearing Steel ◽

Gcr15 Bearing Steel ◽

Plasma Immersion Ion Implantation

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Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677723 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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A semi-analytical method to study the temperature evolutions of a slab and a semi-infinite target for plasma immersion ion implantation

International Journal of Heat and Mass Transfer ◽

10.1016/j.ijheatmasstransfer.2006.08.019 ◽

2007 ◽

Vol 50 (5-6) ◽

pp. 789-798 ◽

Author(s):

F.B. Yeh

Keyword(s):

Ion Implantation ◽

Analytical Method ◽

Plasma Immersion Ion Implantation

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A hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation

IEEE Transactions on Plasma Science ◽

10.1109/27.901204 ◽

2000 ◽

Vol 28 (5) ◽

pp. 1392-1396 ◽

Author(s):

J.O. Rossi ◽

M. Ueda ◽

J.J. Barroso ◽

V.A. Spassov

Keyword(s):

Ion Implantation ◽

Plasma Immersion Ion Implantation

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