Electrostatic-Capacitive MEMS Stiffness Sensor with Position-Feedback Mechanism
2020 ◽
Vol 312
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pp. 112127
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2014 ◽
Vol 721
◽
pp. 244-248
Keyword(s):
1985 ◽
Vol 116
(1)
◽
pp. 357-362
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Keyword(s):
2008 ◽
Vol 2008.8
(0)
◽
pp. 119-120
2008 ◽
Vol 2008
(7-2)
◽
pp. 551-554
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1987 ◽
Vol 45
◽
pp. 896-897
2018 ◽
Vol 2
(1)
◽
pp. 1