Noncyclic Scheduling of Multi-Cluster Tools With Residency Constraints Based on Pareto Optimization

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.2998734 ◽

2020 ◽

Vol 33 (3) ◽

pp. 476-486

Author(s):

Yuanyuan Yan ◽

Huangang Wang ◽

Qinghua Tao ◽

Wenhui Fan ◽

Tingyu Lin ◽

...

Keyword(s):

Pareto Optimization ◽

Cluster Tools ◽

Residency Constraints

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Modelling and scheduling analysis of multi-cluster tools with residency constraints based on time constraint sets

International Journal of Production Research ◽

10.1080/00207543.2013.774490 ◽

2013 ◽

Vol 51 (16) ◽

pp. 4835-4852 ◽

Author(s):

Ming-Xiang Liu ◽

Bing-Hai Zhou

Keyword(s):

Time Constraint ◽

Scheduling Analysis ◽

Cluster Tools ◽

Residency Constraints ◽

Constraint Sets

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Transient scheduling of single armed cluster tools: Algorithms for wafer residency constraints

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653901 ◽

2013 ◽

Author(s):

Hong-Yue Jin ◽

James R. Morrison

Keyword(s):

Cluster Tools ◽

Residency Constraints

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An optimal scheduling technique for dual-arm robots in cluster tools with residency constraints

Proceedings of the 39th IEEE Conference on Decision and Control (Cat. No.00CH37187) ◽

10.1109/cdc.2000.912239 ◽

2002 ◽

Author(s):

S. Rostami ◽

B. Hamidzadeh ◽

D. Camporese

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints ◽

Dual Arm ◽

Scheduling Technique

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Scheduling Close-Down Processes Subject to Wafer Residency Constraints for Single-Arm Cluster Tools

2015 IEEE International Conference on Systems, Man, and Cybernetics ◽

10.1109/smc.2015.102 ◽

2015 ◽

Author(s):

QingHua Zhu ◽

Mengchu Zhou ◽

Yan Qiao ◽

NaiQi Wu

Keyword(s):

Cluster Tools ◽

Residency Constraints

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Optimal K-unit cycle scheduling of two-cluster tools with residency constraints and general robot moving times

Journal of Scheduling ◽

10.1007/s10951-015-0448-7 ◽

2015 ◽

Vol 19 (2) ◽

pp. 165-176 ◽

Author(s):

Xin Li ◽

Richard Y. K. Fung

Keyword(s):

Cluster Tools ◽

Cycle Scheduling ◽

Residency Constraints

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An MIP approach to optimize the fundamental period of multi-cluster tools system with residency constraints

IFAC-PapersOnLine ◽

10.1016/j.ifacol.2015.06.336 ◽

2015 ◽

Vol 48 (3) ◽

pp. 1732-1737

Author(s):

Zhu WANG ◽

Abdelghani BEKRAR ◽

Damien TRENTESAUX ◽

Binghai ZHOU

Keyword(s):

Fundamental Period ◽

Cluster Tools ◽

Residency Constraints

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Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164) ◽

10.1109/robot.2001.933131 ◽

2002 ◽

Author(s):

S. Rostami ◽

B. Hamidzadeh

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints

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An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints

IEEE Transactions on Robotics and Automation ◽

10.1109/70.964662 ◽

2001 ◽

Vol 17 (5) ◽

pp. 609-618 ◽

Author(s):

S. Rostami ◽

B. Hamidzadeh ◽

D. Camporese

Keyword(s):

Cluster Tools ◽

Residency Constraints ◽

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Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2002.801379 ◽

2002 ◽

Vol 15 (3) ◽

pp. 341-349 ◽

Author(s):

S. Rostami ◽

B. Hamidzadeh

Keyword(s):

Optimal Scheduling ◽

Cluster Tools ◽

Residency Constraints

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Noncyclic Scheduling of Multi-cluster Tools with Multi-type Wafers Based on Pareto Optimization

2021 13th International Conference on Computer and Automation Engineering (ICCAE) ◽

10.1109/iccae51876.2021.9426127 ◽

2021 ◽

Author(s):

Yuanyuan Yan ◽

Qinghua Tao ◽

Huangang Wang ◽

Wenhui Fan

Keyword(s):

Pareto Optimization ◽

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