Determination of lateral mode dispersion from full-field imaging of film bulk acoustic resonator motion

IEEE Symposium on Ultrasonics, 2003 ◽

10.1109/ultsym.2003.1293406 ◽

2004 ◽

Author(s):

K.L. Telschow ◽

J.D. Larson

Keyword(s):

Acoustic Resonator ◽

Mode Dispersion ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

Lateral Mode ◽

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Laser Acoustic Imaging of Film Bulk Acoustic Resonator (FBAR) Lateral Mode Dispersion

10.1063/1.1916685 ◽

2005 ◽

Author(s):

Ken L. Telschow

Keyword(s):

Acoustic Resonator ◽

Acoustic Imaging ◽

Mode Dispersion ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

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Full-field imaging of gigahertz film bulk acoustic resonator motion

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2003.1244744 ◽

2003 ◽

Vol 50 (10) ◽

pp. 1279-1285 ◽

Author(s):

K.L. Telschow ◽

V.A. Deason ◽

D.L. Cottle ◽

J.D. Larson

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

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Lateral mode suppression and experiment for the ZnO ring thin-film bulk acoustic resonator

Acta Physica Sinica ◽

10.7498/aps.64.224601 ◽

2015 ◽

Vol 64 (22) ◽

pp. 224601

Author(s):

Li Yu-Jin ◽

Yuan Xiu-Hua ◽

Zhao Ming ◽

Wang Yun-He

Keyword(s):

Thin Film ◽

Acoustic Resonator ◽

Mode Suppression ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

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4E-1 Quantitative Determination of Lateral Mode Dispersion in Film Bulk Acoustic Resonators through Laser Acoustic Imaging

2006 IEEE Ultrasonics Symposium ◽

10.1109/ultsym.2006.98 ◽

2006 ◽

Author(s):

K. L. Telschow ◽

J. D. Larson III

Keyword(s):

Quantitative Determination ◽

Acoustic Imaging ◽

Acoustic Resonators ◽

Mode Dispersion ◽

Film Bulk Acoustic Resonators ◽

Film Bulk ◽

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The Main Lateral Mode Approximation of a Film Bulk Acoustic Resonator With Perfect Metal Electrodes

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control ◽

10.1109/tuffc.2018.2846559 ◽

2018 ◽

Vol 65 (9) ◽

pp. 1703-1716 ◽

Author(s):

Tiberiu Jamneala ◽

Christopher Kirkendall ◽

Brice Ivira ◽

Robert K. Thalhammer ◽

Paul Bradley ◽

...

Keyword(s):

Acoustic Resonator ◽

Metal Electrodes ◽

Film Bulk Acoustic Resonator ◽

Film Bulk ◽

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Low loss film bulk acoustic resonator in liquid environments

10.32469/10355/6083 ◽

2008 ◽

Author(s):

Sai Sumanth Pottigari

Keyword(s):

Acoustic Resonator ◽

Low Loss ◽

Film Bulk Acoustic Resonator ◽

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Design of a FBAR (Film Bulk Acoustic Resonator) Oscillator at 1.6 GHz

Micro and Nanosystems ◽

10.2174/1876402911103020091 ◽

2011 ◽

Vol 3 (2) ◽

pp. 91-98 ◽

Author(s):

Xu Zhang ◽

Wencheng Xu ◽

Junseok Chae

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

Physica B Condensed Matter ◽

10.1016/j.physb.2007.06.028 ◽

2007 ◽

Vol 400 (1-2) ◽

pp. 38-41 ◽

Author(s):

Zhi Yan ◽

Yi Ming Mi ◽

Zhi Tang Song ◽

Wei Li Liu ◽

Hong Ji ◽

...

Keyword(s):

Acoustic Resonator ◽

Film Bulk Acoustic Resonator ◽

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Air-gap type film bulk acoustic resonator using flexible thin substrate

Sensors and Actuators A Physical ◽

10.1016/j.sna.2004.05.035 ◽

2005 ◽

Vol 117 (1) ◽

pp. 62-70 ◽

Author(s):

Yu-Ri Kang ◽

Sung-Chul Kang ◽

Kyeong-Kap Paek ◽

Yong-Kook Kim ◽

Soo-Won Kim ◽

...

Keyword(s):

Acoustic Resonator ◽

Air Gap ◽

Film Bulk Acoustic Resonator ◽

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Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

Integrated Ferroelectrics ◽

10.1080/10584580590899289 ◽

2005 ◽

Vol 69 (1) ◽

pp. 323-332 ◽

Author(s):

Heechul Lee ◽

Jaeyeong Park ◽

Kyunghak Lee ◽

Youngjoon Ko ◽

Jonguk Bu

Keyword(s):

Acoustic Resonator ◽

High Q ◽

Silicon Bulk ◽

Film Bulk Acoustic Resonator ◽

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