Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

2005 ◽  
Vol 69 (1) ◽  
pp. 323-332 ◽  
Author(s):  
Heechul Lee ◽  
Jaeyeong Park ◽  
Kyunghak Lee ◽  
Youngjoon Ko ◽  
Jonguk Bu
Keyword(s):  
Acoustic Resonator ◽  
High Q ◽  
Silicon Bulk ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

scholarly journals The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

Micromachines ◽  
2016 ◽  
Vol 7 (12) ◽  
pp. 231 ◽  
Author(s):  
Da Chen ◽  
Wenwen Ren ◽  
Shuren Song ◽  
Jingjing Wang ◽  
Weihui Liu ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Shear Mode ◽  
Q Factor ◽  
Lateral Field ◽  
Thickness Shear Mode ◽  
High Q ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk ◽  
Thickness Shear

Design of High-Q Film Bulk Acoustic Resonator for 5G Applications

2020 ◽  
Author(s):  
Muhammad Hunain Memon ◽  
Zakir Khan ◽  
Pengzhen Zhang ◽  
Haiding Sun ◽  
Fujiang Lin
Keyword(s):  
Acoustic Resonator ◽  
High Q ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

A micro-machined high-Q film bulk acoustic resonator for chip-scale atomic clock

2012 ◽  
Vol 131 (4) ◽  
pp. 3373-3373
Author(s):  
Liang Tang ◽  
Quan Sun ◽  
Min Qi ◽  
Donghai Qiao
Keyword(s):  
Atomic Clock ◽  
Acoustic Resonator ◽  
High Q ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

High Q-Factor Pure Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquids

2012 ◽  
Vol 10 (1) ◽  
pp. 33-37 ◽  
Author(s):  
Da Chen ◽  
Jingjing Wang ◽  
Hongwei Song ◽  
Shilin Xu ◽  
Dehua Li
Keyword(s):  
Acoustic Resonator ◽  
Shear Mode ◽  
Q Factor ◽  
Thickness Shear Mode ◽  
High Q ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk ◽  
Thickness Shear
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