Effects of surface relaxation on convergent-beam electron diffraction analysis of stress in silicon

2006 ◽  
Vol 223 (3) ◽  
pp. 249-252 ◽  
Author(s):  
A. BENEDETTI ◽  
H. BENDER ◽  
A. LAUWERS ◽  
C. TORREGIANI ◽  
K. MAEX
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