On MEMS/NEMS Biosensor Sensitivity Near Half Natural Frequency

2010 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin Knecht
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Direct Approach ◽  
Mass Detection ◽  
Additional Mass ◽  
Electrostatically Actuated ◽  
Virus Size ◽  
Phase Amplitude

This paper deals with sensitivity of electrostatically actuated Bio-MEMS/NEMS resonator sensors near half natural frequency for mass detection for applications in medicine and biology. Electrostatic force along with fringe correction and Casimir effect are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are provided. An additional mass consisting of a film with a thickness of 100 nm (virus size), and a density of 0.43 of the density of the microsensor, has been added to the sensor. The additional mass shifted the amplitude-frequency curve of the sensor to lower frequencies.

Sensitivity of MEMS/NEMS Biosensors Near Twice Natural Frequency

2010 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Direct Approach ◽  
Mass Detection ◽  
Electrostatically Actuated ◽  
Phase Amplitude

Bio-MEMS/NEMS resonator sensors near twice natural frequency for mass detection are investigated. Electrostatic force along with fringe correction and Casimir effect are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. Phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are reported.

On Nonlinear Response of Capacitive Sensors

2009 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin Knecht
Keyword(s):  
Nonlinear Response ◽  
Casimir Force ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Direct Approach ◽  
Electrostatically Actuated ◽  
Micro Sensor ◽  
Phase Amplitude

This paper investigates electrostatically actuated resonator micro-sensor response near natural frequency. The Casimir effect is included. Both the electrostatic force and the Casimir force introduce nonlinearities in the system. Hamilton’s principle is used to derive the partial-differential equation of motion for the general case of nonuniform sensors. The method of multiple scales is then used in a direct approach of the problem. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform capacitive resonator micro-sensors are provided.

Casimir Effect Influence on NEMS Cantilever Resonators

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin Knecht ◽  
Roberto J. Zapata
Keyword(s):  
Casimir Force ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Direct Approach ◽  
Electrostatically Actuated ◽  
Sensing Applications ◽  
Approximation Problems ◽  
Phase Amplitude

This paper investigates electrostatically actuated nanoelectromechanical (NEMS), to include Casimir effect, resonator response near natural frequency. Both electrostatic force and Casimir force are nonlinear. The method of multiple scales is used in a direct approach of the problem in the case of small actuation, damping, and Casimir effect. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform NEMS cantilever resonators for possible sensing applications are provided.

Near Three Half Natural Frequency Resonance of Electrostatically Actuated MEMS Resonators

2010 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Casimir Force ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Direct Approach ◽  
Electrostatically Actuated ◽  
Mems Resonators ◽  
Phase Amplitude ◽  
Fringe Effect

This paper investigates electrostatically actuated micro resonators response near three half natural frequency. Electrostatic force including fringe effect and Casimir force are included in the model. These forces introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. Phase-amplitude relationship is obtained. Numerical results for electrostatically actuated uniform micro resonator sensors are provided.

Response Near Twice the Natural Frequency of Electrostatically Actuated Microresonators

2010 ◽  
Author(s):  
Martin Knecht ◽  
Dumitru I. Caruntu
Keyword(s):  
Natural Frequency ◽  
Casimir Force ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Equation Of Motion ◽  
Direct Approach ◽  
Electrostatically Actuated ◽  
Phase Amplitude ◽  
Fringe Effect

This paper deals with electrostatically actuated micro resonators response near twice natural frequency. Both the electrostatic force (including fringe effect) and the Casimir force are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are provided.

Reduced Order Model of MEMS Sensors Near Natural Frequency

2011 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Jose C. Solis Silva
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Mass Detection ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator sensor for mass detection is investigated. The excitation is near the natural frequency. A first order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for uniform microresonators with mass deposition and without are reported.

ON NONLINEAR RESPONSE NEAR-HALF NATURAL FREQUENCY OF ELECTROSTATICALLY ACTUATED MICRORESONATORS

2011 ◽  
Vol 11 (04) ◽  
pp. 641-672 ◽  
Author(s):  
DUMITRU I. CARUNTU ◽  
MARTIN KNECHT
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Casimir Effect ◽  
Electrostatic Force ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated ◽  
Fringe Effect

This paper deals with the nonlinear response of electrostatically actuated cantilever beam microresonators near-half natural frequency. A first-order fringe correction of the electrostatic force, viscous damping, and Casimir effect are included in the model. Both forces, electrostatic and Casimir, are nonlinear. The dynamics of the resonator is investigated using the method of multiple scales (MMS) in a direct approach of the problem. The reduced order model (ROM) method, based on Galerkin procedure, is used as well. Steady-state motions are found. Numerical simulations are conducted for uniform microresonators. The influences of damping, actuation, and fringe effect on the resonator response are found.

Reduced Order Model for MEMS Cantilever Resonators Under Soft AC Voltage Near Natural Frequency

2012 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Israel Martinez
Keyword(s):  
Natural Frequency ◽  
Nonlinear Response ◽  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Reduced Order Model ◽  
Order Model ◽  
Reduced Order ◽  
First Order ◽  
Electrostatically Actuated

The nonlinear response of an electrostatically actuated cantilever beam microresonator is investigated. The AC voltage is of frequency near resonator’s natural frequency. A first order fringe correction of the electrostatic force and viscous damping are included in the model. The dynamics of the resonator is investigated using the Reduced Order Model (ROM) method, based on Galerkin procedure. Steady-state motions are found. Numerical results for the uniform microresonator are compared with those obtained via the Method of Multiple Scales (MMS).

Electrostatically Actuated MEMS Cantilevers of Linear Thickness Variation

2013 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Mostafa M. Fath El-Den
Keyword(s):  
Multiple Scales ◽  
Method Of Multiple Scales ◽  
Electrostatic Force ◽  
Constant Width ◽  
Thickness Variation ◽  
Electrostatically Actuated ◽  
Phase Amplitude ◽  
Mems Cantilevers ◽  
Relationship Of ◽  
Steady State Solutions

This paper deals with nonuniform linear thickness variation and constant width MEMS cantilever resonators electrostatically actuated through AC voltage near half natural frequency. The frequency response of the structure is investigated. Nonlinearities in the system arise from the electrostatic force. The electrostatic actuation introduces parametric coefficients in both linear and nonlinear parts of the governing equation. The method of multiple scales (MMS) is used to obtain the phase-amplitude relationship of the system, and the steady-state solutions. Parameters’ influences are reported.

Response of Electrostatically Actuated Sensors Near Half of the Natural Frequency

2009 ◽  
Author(s):  
Dumitru I. Caruntu ◽  
Martin W. Knecht
Keyword(s):  
Natural Frequency ◽  
Governing Equation ◽  
Multiple Scales ◽  
Equation Of Motion ◽  
Casimir Forces ◽  
Order Model ◽  
Reduced Order ◽  
Electrostatically Actuated ◽  
Micro Sensor ◽  
Phase Amplitude

A cantilever micro-resonator electrostatically actuated near half of the natural frequency is investigated. Hamilton’s principle is used to derive the partial-differential equation of motion for a general non-uniform sensor. Nonlinearities arise due to the electrostatic and Casimir forces. The electrostatic actuation introduces parametric coefficients in both linear and nonlinear parts of the governing equation. A direct approach is taken using the method of multiple scales resulting in a phase-amplitude relationship for the system. Numerical results for a uniform capacitive resonator micro-sensor are provided and tested numerically using a reduced-order model of the governing equation of motion.

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