Behavior of fluorocarbon species near temperature controlled and radio frequency biased metal plate in C4F8 plasma
2002 ◽
Vol 20
(4)
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pp. 1420-1425
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2019 ◽
Vol 19
(1)
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pp. 28-34
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1999 ◽
Vol 46
(12)
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pp. 1405-1412
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2017 ◽
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2009 ◽
Vol 135
(5)
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pp. 462
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2003 ◽
Vol 46
(12)
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pp. 1606-1616
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