A multiaperture ion source with adjustable optics to provide well‐collimated, high‐current‐density, low‐ to medium‐energy ion beams
1989 ◽
Vol 7
(2)
◽
pp. 125-131
◽
Keyword(s):
2006 ◽
Vol 77
(3)
◽
pp. 03A514
◽
Keyword(s):
1998 ◽
Vol 103-104
◽
pp. 52-57
◽
Keyword(s):
1981 ◽
Vol 187
(2-3)
◽
pp. 313-321
◽