2016 21st International Conference on Ion Implantation Technology (IIT)
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87
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3
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Published By IEEE

9781509020249
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

High & Low Dose USJ Implantation into Ge-Epi on Si Wafers: Dopant Activation, Damage Recovery and Mobility Effects

2016 ◽  
Author(s):  
John Borland ◽  
Michiro Sugitani ◽  
Joshua Herman ◽  
Karium Huet ◽  
Walt Johnson ◽  
...  
Keyword(s):  
Low Dose ◽  
Dopant Activation

A Hybrid Implant Doping Technique with Plasma Immersion Ion Implant (PIII) Process for 10 nm Fin Cannel of 3D-FET

2016 ◽  
Author(s):  
Yi-Ju Chen ◽  
Ying-Tsan Tang ◽  
Chang-Hsien Lin ◽  
Chun-Chi Chen ◽  
Julian Duchaine ◽  
...  
Keyword(s):  
Doping Technique

Investigation of Floating Gate Implantation Effect on 1Xnm NAND FLASH

2016 ◽  
Author(s):  
Jeng-Hwa Liao ◽  
Zong-Jie Ko ◽  
Hsing-Ju Lin ◽  
Jung-Yu Hsieh ◽  
Ling-Wu Yang ◽  
...  
Keyword(s):  
Floating Gate ◽  
Nand Flash

High Current Ion Implanter "LUXiON"

2016 ◽  
Author(s):  
Yusuke Kuwata ◽  
Tetsuya Igo ◽  
Kohei Tanaka ◽  
Sami K. Hahto ◽  
Tetsuro Yamamoto ◽  
...  
Keyword(s):  
High Current

UV Excimer Laser Annealing for Next Generation Power Electronics

2016 ◽  
Author(s):  
Toshiyuki Tabata ◽  
Sebastien Halty ◽  
Ines Toque-Tresonne ◽  
Fulvio Mazzamuto ◽  
Karim Huet ◽  
...  
Keyword(s):  
Power Electronics ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Next Generation ◽  
Excimer Laser Annealing ◽  
Generation Power

Ion Implantation of Polypropylene Films for the Manufacture of Thin Film Capacitors

2016 ◽  
Author(s):  
Volker Haublein ◽  
Erwin Birnbaum ◽  
Heiner Ryssel ◽  
Lothar Frey ◽  
Marit Djupmyr
Keyword(s):  
Thin Film ◽  
Ion Implantation ◽  
Thin Film Capacitors ◽  
Polypropylene Films

Advances in Ion Source Life: The AMAT Trident XP Source

2016 ◽  
Author(s):  
Antonella Cucchetti ◽  
Alexander Perel ◽  
Craig Chaney ◽  
David Sporleder ◽  
Wayne LeBlanc ◽  
...  
Keyword(s):  
Ion Source

Phosphorus-Implanted Emitter Crystalline Silicon Solar Cell with AL-BSF

2016 ◽  
Author(s):  
Katsuto Tanahashi ◽  
Masaaki Moriya ◽  
Yasuhiro Kida ◽  
Satoshi Utsunomiya ◽  
Tetsuo Fukuda ◽  
...  
Keyword(s):  
Solar Cell ◽  
Silicon Solar Cell ◽  
Crystalline Silicon ◽  
Crystalline Silicon Solar Cell
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