2016 21st International Conference on Ion Implantation Technology (IIT)
Latest Publications

TOTAL DOCUMENTS

87
(FIVE YEARS 0)

H-INDEX

3
(FIVE YEARS 0)

Published By IEEE

9781509020249
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

High Current Ion Implanter "LUXiON"

2016 ◽  
Author(s):  
Yusuke Kuwata ◽  
Tetsuya Igo ◽  
Kohei Tanaka ◽  
Sami K. Hahto ◽  
Tetsuro Yamamoto ◽  
...  
Keyword(s):  
High Current

UV Excimer Laser Annealing for Next Generation Power Electronics

2016 ◽  
Author(s):  
Toshiyuki Tabata ◽  
Sebastien Halty ◽  
Ines Toque-Tresonne ◽  
Fulvio Mazzamuto ◽  
Karim Huet ◽  
...  
Keyword(s):  
Power Electronics ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Next Generation ◽  
Excimer Laser Annealing ◽  
Generation Power

Advances in Ion Source Life: The AMAT Trident XP Source

2016 ◽  
Author(s):  
Antonella Cucchetti ◽  
Alexander Perel ◽  
Craig Chaney ◽  
David Sporleder ◽  
Wayne LeBlanc ◽  
...  
Keyword(s):  
Ion Source

A Hybrid Implant Doping Technique with Plasma Immersion Ion Implant (PIII) Process for 10 nm Fin Cannel of 3D-FET

2016 ◽  
Author(s):  
Yi-Ju Chen ◽  
Ying-Tsan Tang ◽  
Chang-Hsien Lin ◽  
Chun-Chi Chen ◽  
Julian Duchaine ◽  
...  
Keyword(s):  
Doping Technique

Investigation of Floating Gate Implantation Effect on 1Xnm NAND FLASH

2016 ◽  
Author(s):  
Jeng-Hwa Liao ◽  
Zong-Jie Ko ◽  
Hsing-Ju Lin ◽  
Jung-Yu Hsieh ◽  
Ling-Wu Yang ◽  
...  
Keyword(s):  
Floating Gate ◽  
Nand Flash
Load More ...
Sign in / Sign up

Export Citation Format

Share Document