Etch characterization of a broad‐beam electron cyclotron resonance ion source

1990 ◽  
Vol 8 (3) ◽  
pp. 2945-2949 ◽  
Author(s):  
E. Ghanbari ◽  
T. Nguyen ◽  
S. Bui ◽  
E. Ostan
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron ◽  
Beam Electron ◽  
Broad Beam

Summary of the performances of the superconducting electron cyclotron resonance ion source at 14 GHz

1998 ◽  
Vol 69 (12) ◽  
pp. 4082-4085 ◽  
Author(s):  
P. Ludwig ◽  
F. Bourg ◽  
P. Briand ◽  
A. Girard ◽  
G. Melin ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Ion Source ◽  
Electron Cyclotron
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