Atomic force microscopy and friction force microscopy of Langmuir–Blodgett films for microlithography

Author(s):  
Masamichi Fujihira
Author(s):  
E. Meyer ◽  
R. Overney ◽  
L. Howald ◽  
D. Brodbeck ◽  
R. Lüthi ◽  
...  

Nature ◽  
1991 ◽  
Vol 349 (6308) ◽  
pp. 398-400 ◽  
Author(s):  
E. Meyer ◽  
L. Howald ◽  
R. M. Overney ◽  
H. Heinzelmann ◽  
J. Frommer ◽  
...  

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