Enhanced focused ion beam milling with use of nested raster patterns

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/6.0001411 ◽

2022 ◽

Vol 40 (1) ◽

pp. 014002

Author(s):

Roberto Garcia ◽

Lucille A. Giannuzzi ◽

Fred A. Stevie ◽

Phillip Strader

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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A streamlined workflow for automated cryo focused ion beam milling

Journal of Structural Biology ◽

10.1016/j.jsb.2021.107743 ◽

2021 ◽

pp. 107743

Author(s):

Sebastian Tacke ◽

Philipp Erdmann ◽

Zhexin Wang ◽

Sven Klumpe ◽

Michael Grange ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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Addressable Metal-Ferroelectric-Metal Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

Integrated Ferroelectrics ◽

10.1080/10584587.2012.660832 ◽

2012 ◽

Vol 132 (1) ◽

pp. 99-106

Author(s):

Ying Dai ◽

Lei Yang ◽

Longhai Wang ◽

Bin Tian ◽

Lianying Zou ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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A study of angular effects in focused ion beam milling of water ice

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/18/9/095010 ◽

2008 ◽

Vol 18 (9) ◽

pp. 095010 ◽

Author(s):

Jing Fu ◽

Sanjay B Joshi ◽

Jeffrey M Catchmark

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Water Ice ◽

Focused Ion Beam Milling

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Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2009.06.094 ◽

2009 ◽

Vol 267 (18) ◽

pp. 3072-3075 ◽

Author(s):

Lars Pastewka ◽

Roland Salzer ◽

Andreas Graff ◽

Frank Altmann ◽

Michael Moseler

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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Properties of Individually Addressable Ferroelectric Nanocapacitor Arrays Fabricated by Focused Ion Beam Milling

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2013.7482 ◽

2013 ◽

Vol 13 (8) ◽

pp. 5542-5546 ◽

Author(s):

Ying Dai ◽

Lei Yang ◽

Longhai Wang ◽

Lianying Zou ◽

Bin Tian ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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Quantitative off-axis electron holography of GaAsp-njunctions prepared by focused ion beam milling

Journal of Microscopy ◽

10.1111/j.1365-2818.2008.03101.x ◽

2009 ◽

Vol 233 (1) ◽

pp. 102-113 ◽

Author(s):

D. COOPER ◽

R. TRUCHE ◽

A.C. TWITCHETT-HARRISON ◽

R.E. DUNIN-BORKOWSKI ◽

P.A. MIDGLEY

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Electron Holography ◽

Focused Ion Beam Milling

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Experimental investigation of redeposition during focused ion beam milling of high speed steel

Precision Engineering ◽

10.1016/j.precisioneng.2011.12.005 ◽

2012 ◽

Vol 36 (3) ◽

pp. 408-413 ◽

Author(s):

Sanket N. Bhavsar ◽

Sivanandam Aravindan ◽

P. Venkateswara Rao

Keyword(s):

Experimental Investigation ◽

Focused Ion Beam ◽

Ion Beam ◽

High Speed Steel ◽

Focused Ion Beam Milling

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Study and formation of 2D microstructures of sapphire by focused ion beam milling

Microelectronic Engineering ◽

10.1016/j.mee.2007.11.009 ◽

2008 ◽

Vol 85 (3) ◽

pp. 640-645 ◽

Author(s):

Tao Dai ◽

Xiangning Kang ◽

Bei Zhang ◽

Jun Xu ◽

Kui Bao ◽

...

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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Lasing in a ZnO membrane microcavity with designable shape fabricated by focused ion beam milling

2015 20th Microoptics Conference (MOC) ◽

10.1109/moc.2015.7416387 ◽

2015 ◽

Author(s):

Tsu-Chi Chang ◽

Ying-Yu Lai ◽

Yu-Hsun Chou ◽

Tien-Chang Lu

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Focused Ion Beam Milling

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Low energy focused ion beam milling of silicon and germanium nanostructures

Nanotechnology ◽

10.1088/0957-4484/22/10/105304 ◽

2011 ◽

Vol 22 (10) ◽

pp. 105304 ◽

Author(s):

Miroslav Kolíbal ◽

Tomáš Matlocha ◽

Tomáš Vystavěl ◽

Tomáš Šikola

Keyword(s):

Focused Ion Beam ◽

Ion Beam ◽

Silicon And Germanium ◽

Focused Ion Beam Milling

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