scholarly journals Theoretical study for aerial image intensity in resist in high numerical aperture projection optics and experimental verification with one-dimensional patterns

2016 ◽  
Vol 15 (2) ◽  
pp. 021206 ◽  
Author(s):  
Masato Shibuya ◽  
Akira Takada ◽  
Toshiharu Nakashima
Keyword(s):  
Experimental Verification ◽  
Theoretical Study ◽  
Numerical Aperture ◽  
Aerial Image ◽  
Image Intensity ◽  
One Dimensional ◽  
High Numerical Aperture ◽  
Projection Optics

scholarly journals One dimensional focusing with high numerical aperture multilayer Laue lens

2016 ◽  
Author(s):  
Saša Bajt ◽  
Mauro Prasciolu ◽  
Andrew J. Morgan ◽  
Henry N. Chapman ◽  
Jacek Krzywinski ◽  
...  
Keyword(s):  
Numerical Aperture ◽  
One Dimensional ◽  
High Numerical Aperture ◽  
Laue Lens

Fabrication of aspherical mirrors for HiNA (high numerical aperture EUV exposure tool) set-3 projection optics

2004 ◽  
Author(s):  
Tetsuya Oshino ◽  
Takahiro Yamamoto ◽  
Tatsuro Miyoshi ◽  
Masayuki Shiraishi ◽  
Takaharu Komiya ◽  
...  
Keyword(s):  
Numerical Aperture ◽  
High Numerical Aperture ◽  
Tool Set ◽  
Aspherical Mirrors ◽  
Projection Optics

Development of projection optics set-3 for high-numerical-aperture extreme ultraviolet exposure tool (HiNA)

2004 ◽  
Vol 22 (6) ◽  
pp. 2975 ◽  
Author(s):  
Tetsuya Oshino ◽  
Shinichi Takahashi ◽  
Takahiro Yamamoto ◽  
Tatsuya Miyoshi ◽  
Masayuki Shiraishi ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Numerical Aperture ◽  
High Numerical Aperture ◽  
Ultraviolet Exposure ◽  
Projection Optics

scholarly journals Preparation of one-dimensional chains and dense cold atomic clouds with a high numerical aperture four-lens system

2021 ◽  
Vol 103 (4) ◽  
Author(s):  
Antoine Glicenstein ◽  
Giovanni Ferioli ◽  
Ludovic Brossard ◽  
Yvan R. P. Sortais ◽  
Daniel Barredo ◽  
...  
Keyword(s):  
Numerical Aperture ◽  
Lens System ◽  
One Dimensional ◽  
High Numerical Aperture

Theoretical study of the susceptibility of nearly one-dimensional VF2

1978 ◽  
Vol 27 (11) ◽  
pp. 1079-1081 ◽  
Author(s):  
S. Konishi ◽  
K. Motizuki
Keyword(s):  
Theoretical Study ◽  
One Dimensional
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