Phase recovery of high numerical-aperture spherical surfaces in tilt phase-shift interferometry

2016 ◽  
Vol 55 (7) ◽  
pp. 074101 ◽  
Author(s):  
Hagyong Kihm
Keyword(s):  
Phase Shift ◽  
Numerical Aperture ◽  
Phase Recovery ◽  
High Numerical Aperture ◽  
Spherical Surfaces

Calibration of phase-step nonuniformity in sub-nanometer-accuracy testing of high-numerical-aperture spherical surfaces

2012 ◽  
Vol 50 (11) ◽  
pp. 1568-1574 ◽  
Author(s):  
Qun Yuan ◽  
Zhishan Gao ◽  
Yuxuan Zhou ◽  
Guang Chu ◽  
Congyang Zhang
Keyword(s):  
Numerical Aperture ◽  
Phase Step ◽  
High Numerical Aperture ◽  
Spherical Surfaces

Optimal phase shift and reflectance for high numerical aperture EUV phase shift mask

2021 ◽  
Author(s):  
Inhwa Kang ◽  
Jang-Gun Park ◽  
Minwoo Kim ◽  
Jun-Hyeong Lee ◽  
Hye-Keun Oh
Keyword(s):  
Phase Shift ◽  
Numerical Aperture ◽  
High Numerical Aperture ◽  
Phase Shift Mask
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