Optimal phase shift and reflectance for high numerical aperture EUV phase shift mask

Mapping Intimacies ◽

10.1117/12.2602035 ◽

2021 ◽

Author(s):

Inhwa Kang ◽

Jang-Gun Park ◽

Minwoo Kim ◽

Jun-Hyeong Lee ◽

Hye-Keun Oh

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

High Numerical Aperture ◽

Phase Shift Mask

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Phase Shift Mask to Compensate for Mask 3D Effect in High-Numerical-Aperture Extreme Ultraviolet Lithography

Nanoscience and Nanotechnology Letters ◽

10.1166/nnl.2016.2249 ◽

2016 ◽

Vol 8 (9) ◽

pp. 729-733 ◽

Author(s):

Yong Ju Jang ◽

Jung Sik Kim ◽

Seongchul Hong ◽

Jinho Ahn

Keyword(s):

Phase Shift ◽

Extreme Ultraviolet ◽

Numerical Aperture ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography ◽

High Numerical Aperture ◽

3D Effect ◽

Phase Shift Mask

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Exploring the resolution limits of phase-shift mask lithography with a very high numerical aperture ArF step-and-scan system

10.1117/12.473481 ◽

2002 ◽

Author(s):

Harry Sewell ◽

Pankaj Raval ◽

Diane C. McCafferty

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

High Numerical Aperture ◽

Resolution Limits ◽

Phase Shift Mask ◽

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Optimal phase shift mask and multilayer stack with the evaluation of imaging performance and process latitude in extreme ultraviolet high numerical aperture

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/abf2d1 ◽

2021 ◽

Vol 60 (SC) ◽

pp. SCCA04

Author(s):

In-Hwa Kang ◽

Jang-Gun Park ◽

Chung-Hyun Ban ◽

Hye-Keun Oh

Keyword(s):

Phase Shift ◽

Extreme Ultraviolet ◽

Numerical Aperture ◽

High Numerical Aperture ◽

Imaging Performance ◽

Phase Shift Mask

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Rim phase-shift mask combined with off-axis illumination: a path to 0.5(lambda)/numerical aperture geometries

Optical Engineering ◽

10.1117/12.145956 ◽

1993 ◽

Vol 32 (10) ◽

pp. 2337 ◽

Author(s):

Timothy A. Brunner

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

Phase Shift Mask

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Monitoring polarization at 193nm high-numerical aperture with phase shift masks: experimental results and industrial outlook

10.1117/12.773123 ◽

2008 ◽

Author(s):

Gregory McIntyre ◽

Richard Tu

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

Experimental Results ◽

High Numerical Aperture

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Polarization aberrations caused by differential transmission and phase shift in high-numerical-aperture lenses: theory, measurement, and rectification

Optical Engineering ◽

10.1117/1.1467669 ◽

2002 ◽

Vol 41 (5) ◽

pp. 943 ◽

Author(s):

Michael Shribak

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

High Numerical Aperture ◽

Differential Transmission

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Second-order tilted wave interpretation of the Gouy phase shift under high numerical aperture uniform illumination

Optics Communications ◽

10.1016/j.optcom.2004.08.036 ◽

2004 ◽

Vol 242 (4-6) ◽

pp. 351-360 ◽

Author(s):

Qiwen Zhan

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

Second Order ◽

Uniform Illumination ◽

High Numerical Aperture ◽

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Impact of polarization on an attenuated phase shift mask with ArF hyper-numerical aperture lithography

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.2397065 ◽

2006 ◽

Vol 5 (4) ◽

pp. 043001 ◽

Author(s):

Takashi Sato

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

Phase Shift Mask

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Polarization aberrations caused by differential transmission and phase shift in high-numerical-aperture lenses: theory, measurement, and rectification

Collected Works of Shinya Inoué ◽

10.1142/9789812790866_0069 ◽

2008 ◽

pp. 857-868 ◽

Author(s):

Michael Shribak ◽

Shinya Inoué ◽

Rudolf Oldenbourg

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

High Numerical Aperture ◽

Differential Transmission

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Extended averaging phase-shift schemes for Fizeau interferometry on high-numerical-aperture spherical surfaces

10.1117/12.860914 ◽

2010 ◽

Author(s):

Jan Burke

Keyword(s):

Phase Shift ◽

Numerical Aperture ◽

High Numerical Aperture ◽

Spherical Surfaces

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