Monitoring polarization at 193nm high-numerical aperture with phase shift masks: experimental results and industrial outlook

2008 ◽  
Author(s):  
Gregory McIntyre ◽  
Richard Tu
Keyword(s):  
Phase Shift ◽  
Numerical Aperture ◽  
Experimental Results ◽  
High Numerical Aperture

Optimal phase shift and reflectance for high numerical aperture EUV phase shift mask

2021 ◽  
Author(s):  
Inhwa Kang ◽  
Jang-Gun Park ◽  
Minwoo Kim ◽  
Jun-Hyeong Lee ◽  
Hye-Keun Oh
Keyword(s):  
Phase Shift ◽  
Numerical Aperture ◽  
High Numerical Aperture ◽  
Phase Shift Mask

scholarly journals Focal Surface Detection of High Numerical Aperture Objective Lens Based on Differential Astigmatic Method

2021 ◽  
Vol 13 (4) ◽  
pp. 1-8
Author(s):  
Jia-Lin Du ◽  
Wei Yan ◽  
Li-Wei Liu ◽  
Fan-Xing Li ◽  
Fu-Ping Peng ◽  
...  
Keyword(s):  
Numerical Aperture ◽  
Objective Lens ◽  
High Numerical Aperture ◽  
Surface Detection ◽  
Focal Surface
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