scholarly journals Nearly time-optimal feedback control of a magnetically levitated photolithography positioning system

1994 ◽  
Author(s):  
James M. Redmond
2018 ◽  
Vol 51 (32) ◽  
pp. 292-297 ◽  
Author(s):  
Bettina Altmann ◽  
Christian Pape ◽  
Eduard Reithmeier

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