Temperature measurements of semiconductor wafers via a laser thermometer with fiber optic communication line

Author(s):  
O. V. Lukin ◽  
Alexander N. Magunov
1982 ◽  
Vol 12 (8) ◽  
pp. 1088-1090
Author(s):  
Zhores I Alferov ◽  
M I Belovolov ◽  
A N Gur'yanov ◽  
A T Gorelenok ◽  
Evgenii M Dianov ◽  
...  

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