scholarly journals Fast simulation method for parameter reconstruction in optical metrology

Author(s):  
Sven Burger ◽  
Lin Zschiedrich ◽  
Jan Pomplun ◽  
Frank Schmidt ◽  
Bernd Bodermann
Author(s):  
M Gonzalez-Rodriguez ◽  
Carlos Collado ◽  
Jordi Mateu ◽  
J.M. Gonzalez-Arbesu ◽  
Sebastian Huebner ◽  
...  

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