Fast Simulation Method for Contact Hole Mask in Extreme-Ultraviolet Lithography
2010 ◽
Vol 87
(11)
◽
pp. 2134-2138
◽
2005 ◽
Vol 44
(7B)
◽
pp. 5560-5564
◽
Keyword(s):
2011 ◽
Vol 29
(1)
◽
pp. 011022
◽