scholarly journals Impact of pixel-dose optimization on pattern fidelity for helium ion beam lithography on EUV resist

2015 ◽  
Author(s):  
Nima Kalhor ◽  
Wouter Mulckhuyse ◽  
Paul Alkemade ◽  
Diederik Maas
Keyword(s):  
Ion Beam ◽  
Dose Optimization ◽  
Ion Beam Lithography ◽  
Helium Ion

Large-Scale Focused Helium Ion Beam Lithography

2021 ◽  
Vol 31 (5) ◽  
pp. 1-4
Author(s):  
Jay C. LeFebvre ◽  
Shane A. Cybart
Keyword(s):  
Large Scale ◽  
Ion Beam ◽  
Ion Beam Lithography ◽  
Helium Ion

scholarly journals Sub-10 nm electron and helium ion beam lithography using a recently developed alumina resist

2018 ◽  
Vol 193 ◽  
pp. 18-22 ◽  
Author(s):  
Andrea Cattoni ◽  
Dominique Mailly ◽  
Olivier Dalstein ◽  
Marco Faustini ◽  
Gediminas Seniutinas ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography ◽  
Helium Ion

scholarly journals Nanoaperture fabrication in ultra-smooth single-grain gold films with helium ion beam lithography

2020 ◽  
Vol 31 (46) ◽  
pp. 465302
Author(s):  
Chenyi Zhang ◽  
Jinxin Li ◽  
Alex Belianinov ◽  
Zhao Ma ◽  
C Kyle Renshaw ◽  
...  
Keyword(s):  
Ion Beam ◽  
Gold Films ◽  
Ion Beam Lithography ◽  
Helium Ion ◽  
Single Grain

Development of Nickel-Based Negative Tone Metal Oxide Cluster Resists for Sub-10 nm Electron Beam and Helium Ion Beam Lithography

2020 ◽  
Vol 12 (17) ◽  
pp. 19616-19624 ◽  
Author(s):  
Rudra Kumar ◽  
Manvendra Chauhan ◽  
Mohamad G. Moinuddin ◽  
Satinder K. Sharma ◽  
Kenneth E. Gonsalves
Keyword(s):  
Electron Beam ◽  
Metal Oxide ◽  
Ion Beam ◽  
Oxide Cluster ◽  
Ion Beam Lithography ◽  
Helium Ion ◽  
Metal Oxide Cluster ◽  
Negative Tone

Direct visualization of beam-resist interaction volume for sub-nanometer helium ion beam lithography

2021 ◽  
Author(s):  
Yunsheng Deng ◽  
Xin Zhuang ◽  
Wu Wang ◽  
Rui Gu ◽  
Dongsheng He ◽  
...  
Keyword(s):  
Ion Beam ◽  
Direct Visualization ◽  
Interaction Volume ◽  
Ion Beam Lithography ◽  
Helium Ion

scholarly journals Helium ion beam lithography on fullerene molecular resists for sub-10nm patterning

2016 ◽  
Vol 155 ◽  
pp. 74-78 ◽  
Author(s):  
Xiaoqing Shi ◽  
Philip Prewett ◽  
Ejaz Huq ◽  
Darren M. Bagnall ◽  
Alex P.G. Robinson ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography ◽  
Helium Ion

Resists for Helium Ion Beam Lithography: Recent Advances

2020 ◽  
Vol 2 (12) ◽  
pp. 3805-3817
Author(s):  
Nagarjuna Ravi Kiran ◽  
Manvendra Chauhan ◽  
Satinder K. Sharma ◽  
Subrata Ghosh ◽  
Kenneth E. Gonsalves
Keyword(s):  
Ion Beam ◽  
Ion Beam Lithography ◽  
Recent Advances ◽  
Helium Ion
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