Innovative multi-cantilever array sensor system with MOEMS read-out
2005 ◽
Vol 117
(4)
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pp. 2440-2440
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1993 ◽
Vol 10
(3)
◽
pp. 219-222
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2016 ◽
Vol 16
(12)
◽
pp. 4675-4682
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2017 ◽
Vol 45
(1)
◽
pp. 42-47
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Keyword(s):
1996 ◽
Vol 8
(11)
◽
pp. 1522-1524
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