Study of RLS trade-off mitigation utilizing a novel negative chemically amplified resist for high resolution patterning
2019 ◽
Vol 114
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pp. 11-18
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1996 ◽
Vol 30
(1-4)
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pp. 327-330
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2004 ◽
Vol 73-74
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pp. 271-277
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2003 ◽
Vol 67-68
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pp. 274-282
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2010 ◽
Vol 10
(11)
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pp. 7130-7133
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1991 ◽
Vol 9
(6)
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pp. 3338
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