InAlGaN-based ridge-guide laser diodes using remote plasma chemical vapour deposition for enhanced performance

2021 ◽  
Author(s):  
Josh D. Brown ◽  
Satya Barik ◽  
Qian Gao ◽  
Brad Siskavich ◽  
Marie Wintrebert-Fouquet ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Laser Diodes ◽  
Chemical Vapour ◽  
Remote Plasma ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition ◽  
Ridge Guide

SiCN alloys obtained by remote plasma chemical vapour deposition from novel precursors

2003 ◽  
Vol 429 (1-2) ◽  
pp. 144-151 ◽  
Author(s):  
T.P. Smirnova ◽  
A.M. Badalian ◽  
L.V. Yakovkina ◽  
V.V. Kaichev ◽  
V.I. Bukhtiyarov ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Remote Plasma ◽  
Plasma Chemical ◽  
Plasma Chemical Vapour Deposition
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