Effect of N2O/SiH4 ratio on the properties of low-temperature silicon oxide films from remote plasma chemical vapour deposition
1999 ◽
Vol 32
(16)
◽
pp. 1955-1962
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1991 ◽
Vol 139
◽
pp. 79-84
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2002 ◽
Vol 11
(3-6)
◽
pp. 918-921
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1991 ◽
Vol 02
(C2)
◽
pp. C2-847-C2-847
2003 ◽
Vol 429
(1-2)
◽
pp. 144-151
◽