Wafer defect pattern classification robust for rotation

International Workshop on Advanced Imaging Technology (IWAIT) 2021 ◽

10.1117/12.2591005 ◽

2021 ◽

Author(s):

Yuki Okazaki ◽

Hiroki Takahashi

Keyword(s):

Pattern Classification ◽

Download Full-text

Wafer Map Defect Pattern Classification and Image Retrieval Using Convolutional Neural Network

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2018.2795466 ◽

2018 ◽

Vol 31 (2) ◽

pp. 309-314 ◽

Author(s):

Takeshi Nakazawa ◽

Deepak V. Kulkarni

Keyword(s):

Neural Network ◽

Image Retrieval ◽

Convolutional Neural Network ◽

Pattern Classification ◽

Download Full-text

Memory-Augmented Convolutional Neural Networks With Triplet Loss for Imbalanced Wafer Defect Pattern Classification

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.3010984 ◽

2020 ◽

Vol 33 (4) ◽

pp. 622-634 ◽

Author(s):

Yunseung Hyun ◽

Heeyoung Kim

Keyword(s):

Neural Networks ◽

Convolutional Neural Networks ◽

Pattern Classification ◽

Triplet Loss ◽

Download Full-text

Note on CapsNet-Based Wafer Map Defect Pattern Classification

10.1109/ats52891.2021.00019 ◽

2021 ◽

Author(s):

Itsuki Fujita ◽

Yoshikazu Nagamura ◽

Masayuki Arai ◽

Satoshi Fukumoto

Keyword(s):

Pattern Classification ◽

Download Full-text

Wafer defect pattern classification with detecting out-of-distribution

Microelectronics Reliability ◽

10.1016/j.microrel.2021.114157 ◽

2021 ◽

Vol 122 ◽

pp. 114157

Author(s):

Yusung Kim ◽

Donghee Cho ◽

Jee-Hyong Lee

Keyword(s):

Pattern Classification ◽

Download Full-text

Self-Supervised Representation Learning for Wafer Bin Map Defect Pattern Classification

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.3038165 ◽

2020 ◽

pp. 1-1

Author(s):

Hyungu Kahng ◽

Seoung Bum Kim

Keyword(s):

Pattern Classification ◽

Representation Learning ◽

Defect Pattern ◽

Download Full-text

A Wafer Map Defect Pattern Classification Model Based on Deep Convolutional Neural Network

2020 IEEE 15th International Conference on Solid-State & Integrated Circuit Technology (ICSICT) ◽

10.1109/icsict49897.2020.9278021 ◽

2020 ◽

Author(s):

Dong-Yang Du ◽

Zheng Shi

Keyword(s):

Neural Network ◽

Convolutional Neural Network ◽

Pattern Classification ◽

Deep Convolutional Neural Network ◽

Classification Model ◽

Model Based ◽

Download Full-text

An oversampling method for wafer map defect pattern classification considering small and imbalanced data

Computers & Industrial Engineering ◽

10.1016/j.cie.2021.107767 ◽

2021 ◽

pp. 107767

Author(s):

Eun-Su Kim ◽

Seung-Hyun Choi ◽

Dong-Hee Lee ◽

Kwang-Jae Kim ◽

Young-Mok Bae ◽

...

Keyword(s):

Pattern Classification ◽

Imbalanced Data ◽

Download Full-text

A self-adaptive DBSCAN-based method for wafer bin map defect pattern classification

Microelectronics Reliability ◽

10.1016/j.microrel.2021.114183 ◽

2021 ◽

Vol 123 ◽

pp. 114183

Author(s):

Shouhong Chen ◽

Mulan Yi ◽

Yuxuan Zhang ◽

Xingna Hou ◽

Yuling Shang ◽

...

Keyword(s):

Pattern Classification ◽

Defect Pattern ◽

Bin Map ◽

Download Full-text

Wafer map defect pattern classification based on convolutional neural network features and error-correcting output codes

Journal of Intelligent Manufacturing ◽

10.1007/s10845-020-01540-x ◽

2020 ◽

Vol 31 (8) ◽

pp. 1861-1875 ◽

Author(s):

Cheng Hao Jin ◽

Hyun-Jin Kim ◽

Yongjun Piao ◽

Meijing Li ◽

Minghao Piao

Keyword(s):

Neural Network ◽

Convolutional Neural Network ◽

Pattern Classification ◽

Defect Pattern ◽

Error Correcting Output Codes

Download Full-text

Brain-Inspired Computing for Wafer Map Defect Pattern Classification

10.1109/itc50571.2021.00020 ◽

2021 ◽

Author(s):

Paul R. Genssler ◽

Hussam Amrouch

Keyword(s):

Pattern Classification ◽

Download Full-text