Numerical simulation of microassembly of MEMS devices and post-assembly electromechanical actuation

2000 ◽  
Author(s):  
Daniel J. Keating ◽  
Yie He ◽  
Nora Finch ◽  
James Marchetti
2009 ◽  
Vol 00 (00) ◽  
pp. 090904073309027-8
Author(s):  
H.W. Wang ◽  
S. Kyriacos ◽  
L. Cartilier

2007 ◽  
Vol 55 (S 1) ◽  
Author(s):  
W Schiller ◽  
K Spiegel ◽  
T Schmid ◽  
H Rudorf ◽  
S Flacke ◽  
...  

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