Compact debris shutter design of a laser-produced plasma source for high-NA application

2000 ◽  
Author(s):  
Masaki Yamamoto ◽  
Minaji Furudate ◽  
Norio Sato ◽  
Hirochi Takagi
Keyword(s):  
Plasma Source ◽  
Laser Produced Plasma

Efficient multiline nanosecond pulse amplification in planar waveguide CO_2 amplifier for extreme UV laser-produced plasma source

2014 ◽  
Vol 39 (7) ◽  
pp. 1953 ◽  
Author(s):  
Krzysztof M. Nowak ◽  
Takeshi Ohta ◽  
Takashi Suganuma ◽  
Junichi Fujimoto ◽  
Hakaru Mizoguchi ◽  
...  
Keyword(s):  
Planar Waveguide ◽  
Plasma Source ◽  
Nanosecond Pulse ◽  
Uv Laser ◽  
Pulse Amplification ◽  
Laser Produced Plasma ◽  
Extreme Uv

A Soft X-Ray/EUV Reflectometer Based on a Laser Produced Plasma Source

1992 ◽  
Vol 3 (4) ◽  
pp. 283-299
Author(s):  
E. M. Gullikson ◽  
J. H. Underwood ◽  
P. C. Batson ◽  
V. Nikitin
Keyword(s):  
Plasma Source ◽  
X Ray ◽  
Laser Produced Plasma

Damage and degradation of optics and sensors under intense EUV radiation from a table-top laser produced plasma source

2009 ◽  
Author(s):  
Frank Barkusky ◽  
Armin Bayer ◽  
Bernhard Flöter ◽  
Christian Peth ◽  
Klaus Mann
Keyword(s):  
Plasma Source ◽  
Laser Produced Plasma

scholarly journals Investigation of ions emitted from a tin fuelled laser produced plasma source

2009 ◽  
Vol 163 ◽  
pp. 012116 ◽  
Author(s):  
A O'Connor ◽  
P Dunne ◽  
O Morris ◽  
F O'Reilly ◽  
G O'Sullivan ◽  
...  
Keyword(s):  
Plasma Source ◽  
Laser Produced Plasma

Laser-produced plasma source development for EUV lithography

2009 ◽  
Author(s):  
H. Komori ◽  
T. Abe ◽  
A. Sumitani ◽  
Y. Watanabe ◽  
T. Ishihara ◽  
...  
Keyword(s):  
Plasma Source ◽  
Euv Lithography ◽  
Laser Produced Plasma

EUV laser produced plasma source development

2009 ◽  
Vol 86 (4-6) ◽  
pp. 509-512 ◽  
Author(s):  
Nigel R. Farrar ◽  
David C. Brandt ◽  
Igor V. Fomenkov ◽  
Alex I. Ershov ◽  
Norbert R. Bowering ◽  
...  
Keyword(s):  
Plasma Source ◽  
Laser Produced Plasma

Development of a grazing incidence soft X-ray microscope with a laser-produced plasma source

1996 ◽  
Vol 80 ◽  
pp. 357-360 ◽  
Author(s):  
Taro Ogata ◽  
Kiyotoshi Iimura ◽  
Sadao Aoki ◽  
Yasuji Yoshidomi ◽  
Osamu Mitomi ◽  
...  
Keyword(s):  
Grazing Incidence ◽  
Plasma Source ◽  
X Ray ◽  
Laser Produced Plasma
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