Damage and degradation of optics and sensors under intense EUV radiation from a table-top laser produced plasma source
2009 ◽
Vol 163
◽
pp. 012116
◽
2002 ◽
Vol 61-62
◽
pp. 139-144
◽
2009 ◽
Vol 86
(4-6)
◽
pp. 509-512
◽
1996 ◽
Vol 80
◽
pp. 357-360
◽