Wavelength tuning of GaAs/AlGaAs quantum well infrared photodetectors by rapid thermal annealing and proton implantation

2000 ◽  
Author(s):  
Ning Li ◽  
Xingquan Liu ◽  
Na Li ◽  
Wei Lu ◽  
Xianzhang Yuan ◽  
...  
2018 ◽  
Vol 26 (1) ◽  
pp. 552 ◽  
Author(s):  
Wei-Cheng Hsu ◽  
Hong-Shi Ling ◽  
Shiang-Yu Wang ◽  
Chien-Ping Lee

1996 ◽  
Vol 80 (8) ◽  
pp. 4737-4740 ◽  
Author(s):  
J. I. Malin ◽  
P. Liu ◽  
D. K. Sengupta ◽  
W. C. Fang ◽  
S. L. Chuang ◽  
...  

1999 ◽  
Vol 38 (Part 1, No. 9A) ◽  
pp. 5044-5045 ◽  
Author(s):  
Xingquan Liu ◽  
Ning Li ◽  
Xiaoshuang Chen ◽  
Wei Lu ◽  
Wenlan Xu ◽  
...  

2001 ◽  
Vol 692 ◽  
Author(s):  
L. Fu ◽  
H. H. Tan ◽  
M. I. Cohen ◽  
C. Jagadish ◽  
L. V. Dao ◽  
...  

AbstractIon implantation induced intermixing of GaAs/AlGaAs and InGaAs/AlGaAs quantum wells was studied using low temperature photoluminescence. Large energy shifts were observed with proton implantation and subsequent rapid thermal annealing. Energy shifts were found to be linear as a function of dose for doses as high as ∼5×1016 cm−2. Proton implantation and subsequent rapid thermal annealing was used to tune the emission wavelength of InGaAs quantum well lasers as well as detection wavelength of GaAs/AlGaAs quantum well infrared photodetectors (QWIPs). Emission wavelength of lasers showed blue shift whereas detection wavelength of QWIPs was red shifted with intermixing.


1992 ◽  
Vol 61 (15) ◽  
pp. 1781-1783 ◽  
Author(s):  
K. K. Choi ◽  
M. Taysing‐Lara ◽  
P. G. Newman ◽  
W. Chang ◽  
G. J. Iafrate

1999 ◽  
Author(s):  
K. K. Choi ◽  
C. J. Chen ◽  
L. P. Rohkinson ◽  
N. C. Das ◽  
M. Jhabvala

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