Fabrication and characterization of c-axis-oriented transparent conductive nanocrystalline AZO thin films by rf magnetron sputtering

2002 ◽  
Author(s):  
Guojia Fang ◽  
Dejie Li ◽  
Bao-Lun Yao
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Fabrication And Characterization

Fabrication and characterization of Mn-doped Cu2O thin films grown by RF magnetron sputtering

2008 ◽  
Vol 320 (23) ◽  
pp. 3303-3306 ◽  
Author(s):  
Yaping Zhang ◽  
Liqing Pan ◽  
Hao Zhu ◽  
Hongmei Qiu ◽  
Jinghua Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Cu2o Thin Films ◽  
Fabrication And Characterization ◽  
Mn Doped

Fabrication and characterization of Bi-doped Y2O3 phosphor thin films by RF magnetron sputtering

2016 ◽  
Vol 600 ◽  
pp. 83-89 ◽  
Author(s):  
Sung-Ik Park ◽  
Seong-Il Kim ◽  
Soo Kyung Chang ◽  
Young-Hwan Kim
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Fabrication And Characterization

Wafer-Level Fabrication and Characterization of Amorphous Thin Films MoS2 Prepared by RF Magnetron Sputtering Technique

2016 ◽  
Vol 75 (13) ◽  
pp. 131-137
Author(s):  
K. R. Gustavsen ◽  
K. A. Nygard ◽  
P. Honerod-Bentsen ◽  
K. Du ◽  
G. Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Wafer Level ◽  
Amorphous Thin Films ◽  
Fabrication And Characterization
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