Fabrication and Characterization of Nickel Titanium Shape memory Thin Films by RF Magnetron Sputtering for MEMS Applications
2002 ◽
Vol 3
(3-4)
◽
2008 ◽
Vol 320
(23)
◽
pp. 3303-3306
◽
Keyword(s):
2006 ◽
Vol 438-440
◽
pp. 986-989
◽
Keyword(s):
2011 ◽
Vol 509
(5)
◽
pp. L95-L98
◽