Power scale-up of the extreme-ultraviolet electric capillary discharge source

Mapping Intimacies ◽

10.1117/12.472282 ◽

2002 ◽

Author(s):

Neal R. Fornaciari ◽

Howard Bender ◽

Dean Buchenauer ◽

Jason L. Dimkoff ◽

Michael P. Kanouff ◽

...

Keyword(s):

Extreme Ultraviolet ◽

Scale Up ◽

Capillary Discharge ◽

Discharge Source ◽

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Development of a high-average-power extreme-ultraviolet electric capillary discharge source

10.1117/12.436652 ◽

2001 ◽

Author(s):

Neal R. Fornaciari ◽

Howard Bender ◽

Dean Buchenauer ◽

Michael P. Kanouff ◽

Steve Karim ◽

...

Keyword(s):

Extreme Ultraviolet ◽

Average Power ◽

Capillary Discharge ◽

High Average Power ◽

Discharge Source

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Effect of a strong axial magnetic field in the plasma recombination and extreme ultraviolet emission from a highly-ionized capillary discharge

IEEE Journal of Quantum Electronics ◽

10.1109/3.60905 ◽

1990 ◽

Vol 26 (10) ◽

pp. 1809-1814 ◽

Author(s):

M.C. Marconi ◽

J.J. Rocca ◽

J.F. Schmerge ◽

M. Villagram ◽

F.J. Lehmann

Keyword(s):

Magnetic Field ◽

Extreme Ultraviolet ◽

Axial Magnetic Field ◽

Capillary Discharge ◽

Ultraviolet Emission

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Impact of Laser on Coupled Extreme Ultraviolet Source from Three Plasmas in Capillary Discharge

Chinese Journal of Lasers ◽

10.3788/cjl201542.0602009 ◽

2015 ◽

Vol 42 (6) ◽

pp. 0602009

Author(s):

张兴强 Zhang Xingqiang ◽

靳龙 Jin Long

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge

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Influence of current prepulse on capillary-discharge extreme-ultraviolet laser

Physical Review A ◽

10.1103/physreva.75.043808 ◽

2007 ◽

Vol 75 (4) ◽

Author(s):

C. A. Tan ◽

K. H. Kwek

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Laser

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Time-resolved study of the extreme-ultraviolet emission and plasma dynamics of a sub-Joule, fast capillary discharge

Physics of Plasmas ◽

10.1063/1.4927775 ◽

2015 ◽

Vol 22 (8) ◽

pp. 083501 ◽

Author(s):

J. C. Valenzuela ◽

E. S. Wyndham ◽

M. Favre

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Emission ◽

Plasma Dynamics ◽

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Scale-up of a cluster jet laser plasma source for extreme ultraviolet lithography

10.1117/12.351142 ◽

1999 ◽

Author(s):

Glenn D. Kubiak ◽

Luis J. Bernardez II ◽

Kevin D. Krenz ◽

William C. Sweatt

Keyword(s):

Laser Plasma ◽

Extreme Ultraviolet ◽

Scale Up ◽

Plasma Source ◽

Extreme Ultraviolet Lithography ◽

Ultraviolet Lithography

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Time‐resolved extreme ultraviolet emission from a highly ionized lithium capillary discharge

Applied Physics Letters ◽

10.1063/1.101158 ◽

1989 ◽

Vol 54 (22) ◽

pp. 2180-2182 ◽

Author(s):

Mario C. Marconi ◽

Jorge J. Rocca

Keyword(s):

Extreme Ultraviolet ◽

Capillary Discharge ◽

Ultraviolet Emission ◽

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Development of an electric capillary discharge source

10.1117/12.390047 ◽

2000 ◽

Author(s):

Neal R. Fornaciari ◽

Jim J. Chang ◽

Daniel R. Folk ◽

Steven E. Gianoulakis ◽

John E. M. Goldsmith ◽

...

Keyword(s):

Capillary Discharge ◽

Discharge Source

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Distributed face cooling scheme for tiny laser power scale-up

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) ◽

10.23919/ltb-3d.2017.7947404 ◽

2017 ◽

Author(s):

Arvydas Kausas ◽

Lihe Zheng ◽

Takunori Taira

Keyword(s):

Laser Power ◽

Scale Up ◽

Power Scale ◽

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Development and demonstration of a water-window soft x-ray microscope using a Z-pinching capillary discharge source

10.1117/12.2269601 ◽

2017 ◽

Author(s):

M. F. Nawaz ◽

Alexandr Jancarek ◽

Michal Nevrkla ◽

Martin Jakub Duda ◽

Ladislav Pina

Keyword(s):

Capillary Discharge ◽

X Ray ◽

Water Window ◽

Discharge Source

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