Scale-up of a cluster jet laser plasma source for extreme ultraviolet lithography

1999 ◽  
Author(s):  
Glenn D. Kubiak ◽  
Luis J. Bernardez II ◽  
Kevin D. Krenz ◽  
William C. Sweatt
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Scale Up ◽  
Plasma Source ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography

Dynamics of Mass-Limited Laser Plasma Targets as Sources for Extreme Ultraviolet Lithography

2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4070-4073 ◽  
Author(s):  
Christian Keyser ◽  
Robert Bernath ◽  
Moza Al-Rabban ◽  
Martin Richardson
Keyword(s):  
Laser Plasma ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography
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