Accurate gate CD control through the full-chip area using the dual model in the model-based OPC

2004 ◽  
Author(s):  
Ji-Suk Hong ◽  
Chul-Hong Park ◽  
Dong-Hyun Kim ◽  
Soo-Han Choi ◽  
Yong-Chan Ban ◽  
...  
Keyword(s):  
Author(s):  
Q Li

Parallel structure robots have been receiving growing attention from both academia and industry in recent years. This is due to their advantages over serial structure robots, such as high stiffness, high motion accuracy and a high load-structure ratio. Control of parallel robots, however, produces difficulties to control engineers due to the modelling errors arising from the highly non-linear and complex structures. This paper proposes a dual-model-based structure for error attenuation in the trajectory-tracking control of a parallel robot manipulator. In this design, a conventional model-based control algorithm employing an estimated robot dynamic model is first implemented in the inner loop of the control structure. Then, in order to reduce the unwanted effects caused by modelling erros, another model-based structure, developed based on the concept of the internal model control, is appended in the outer loop of the control structure as a compensator. A combination of these two model-based components results in a novel dual-model-based structure for parallel robot control. Sensitivity analyses show that the effects due to modelling errors and external disturbances can be significantly reduced by applying this new control structure without relying on a high-gain control solution. The effectiveness of this control design is successfully demonstrated by numerical studies on a planar parallel robot with 2 degrees of freedom.


2016 ◽  
Vol 178 ◽  
pp. 3-10 ◽  
Author(s):  
Si-Qi Wang ◽  
Xiang-Chu Feng ◽  
Wei-Wei Wang

Author(s):  
Q. Li ◽  
W. J. Zhang ◽  
S. K. Tso

Abstract This paper proposes a dual-model-based structure for uncertainty attenuation in the trajectory-tracking control of robot manipulators. A conventional model-based control algorithm with an estimated robot dynamic model employed is first placed in the overall structure as a basic control component. To further attenuate the unwanted effects caused by modelling uncertainties, another model-based structure, appended in the outer-loop of the basic control structure as a compensator, is developed based on the concept of the internal model control. Combination of these two model-based structures results in a novel dual-model-based controller for robot manipulators. Sensitivity analyses show that the effects due to both modelling errors and external disturbances can be significantly reduced by applying this dual-model-based control structure without relying on a high-gain control solution. Effectiveness of this control design is successfully demonstrated by simulation studies on a 2 degree-of-freedom robot.


2020 ◽  
Vol 43 ◽  
Author(s):  
Peter Dayan

Abstract Bayesian decision theory provides a simple formal elucidation of some of the ways that representation and representational abstraction are involved with, and exploit, both prediction and its rather distant cousin, predictive coding. Both model-free and model-based methods are involved.


2001 ◽  
Vol 7 (S2) ◽  
pp. 578-579
Author(s):  
David W. Knowles ◽  
Sophie A. Lelièvre ◽  
Carlos Ortiz de Solόrzano ◽  
Stephen J. Lockett ◽  
Mina J. Bissell ◽  
...  

The extracellular matrix (ECM) plays a critical role in directing cell behaviour and morphogenesis by regulating gene expression and nuclear organization. Using non-malignant (S1) human mammary epithelial cells (HMECs), it was previously shown that ECM-induced morphogenesis is accompanied by the redistribution of nuclear mitotic apparatus (NuMA) protein from a diffuse pattern in proliferating cells, to a multi-focal pattern as HMECs growth arrested and completed morphogenesis . A process taking 10 to 14 days.To further investigate the link between NuMA distribution and the growth stage of HMECs, we have investigated the distribution of NuMA in non-malignant S1 cells and their malignant, T4, counter-part using a novel model-based image analysis technique. This technique, based on a multi-scale Gaussian blur analysis (Figure 1), quantifies the size of punctate features in an image. Cells were cultured in the presence and absence of a reconstituted basement membrane (rBM) and imaged in 3D using confocal microscopy, for fluorescently labeled monoclonal antibodies to NuMA (fαNuMA) and fluorescently labeled total DNA.


Author(s):  
Charles Bouveyron ◽  
Gilles Celeux ◽  
T. Brendan Murphy ◽  
Adrian E. Raftery

Author(s):  
Jonathan Jacky ◽  
Margus Veanes ◽  
Colin Campbell ◽  
Wolfram Schulte
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document