Dissolution behavior of chemically amplified resist for advanced mask- and NIL mold-making as studied by dissolution rate monitor

2006 ◽  
Author(s):  
Kazumasa Takeshi ◽  
Kazuto Oono ◽  
Yoshiyuki Negishi ◽  
Daisuke Inokuchi ◽  
Keishi Tanaka ◽  
...  
1998 ◽  
Author(s):  
Medhat A. Toukhy ◽  
Sanjay Malik ◽  
Andrew J. Blakeney ◽  
Karin R. Schlicht

1997 ◽  
Author(s):  
Zheng Cui ◽  
R. A. Moody ◽  
Ian M. Loader ◽  
John G. Watson ◽  
Philip D. Prewett

2000 ◽  
Vol 147 (10) ◽  
pp. 3833 ◽  
Author(s):  
Chin-Yu Ku ◽  
Jia-Min Shieh ◽  
Tsann-Bim Chiou ◽  
Hwang-Kuen Lin ◽  
Tan Fu Lei

1994 ◽  
Vol 6 (4) ◽  
pp. 481-488 ◽  
Author(s):  
William D. Hinsberg ◽  
Scott A. MacDonald ◽  
Nicholas J. Clecak ◽  
Clinton D. Snyder

1993 ◽  
Author(s):  
Michael T. Reilly ◽  
Azalia A. Krasnoperova ◽  
Quinn J. Leonard ◽  
James W. Taylor ◽  
Shaowie Pan

2012 ◽  
Vol 1518 ◽  
pp. 79-84 ◽  
Author(s):  
Hideaki Miyakawa ◽  
Tomofumi Sakuragi ◽  
Hitoshi Owada ◽  
Osamu Kato ◽  
Kaoru Masuda

ABSTRACTIodine filters expended after nuclear fuel reprocessing contain radioactive iodine (I-129), almost all of which exists as silver iodide (AgI). The synthetic rock technique is a solidification treatment technique using hot isostatic press (HIP), in which the alumina adsorbent base material is synthesized to form a dense solidified material (synthetic rock), and I-129 is physically confined in the form of AgI in the alumina matrix. Thus, it is necessary to understand the matrix dissolution behavior to evaluate the iodine release behavior.Experiments involving the dissolution of the matrix were carried out under various temperatures (35–70 °C) and pH values (10–12.5) that reflect the disposal conditions. The results of the experiments showed that the dissolution rate of Al visibly increases with temperature and pH. The dissolution rate constant was calculated from the initial data assuming the dissolution of the matrix as a primary reaction. The logarithmic rate constant showed a good linear correlation with the pH and the reciprocal of temperature. The 27Al-NMR analysis of the solutions of the dissolved matrix showed that the major chemical species present in the solutions was Al(OH)4-. This indicated that the dissolution of the matrix can be described by the following equation: Al2O3 + 2OH- + 3H2O → 2Al(OH)4-. Subsequently, the empirical equation of the rate of dissolution of the matrix as a function of the temperature and pH was derived. It will be used to evaluate the iodine release behavior from the synthetic rock.


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