An in situ analysis of the resist pattern formation process

Mapping Intimacies ◽

10.1117/12.916343 ◽

2012 ◽

Author(s):

Julius Joseph Santillan ◽

Toshiro Itani

Keyword(s):

Pattern Formation ◽

Formation Process ◽

In Situ Analysis

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In situ analysis of negative-tone resist pattern formation using organic-solvent-based developer process

Applied Physics Express ◽

10.7567/apex.7.016501 ◽

2013 ◽

Vol 7 (1) ◽

pp. 016501 ◽

Author(s):

Julius Joseph Santillan ◽

Keisaku Yamada ◽

Toshiro Itani

Keyword(s):

Pattern Formation ◽

Organic Solvent ◽

In Situ Analysis ◽

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In situ Analysis of the EUV Resist Pattern Formation during the Resist Dissolution Process

Journal of Photopolymer Science and Technology ◽

10.2494/photopolymer.26.611 ◽

2013 ◽

Vol 26 (5) ◽

pp. 611-616 ◽

Author(s):

Jullius Joseph Santillan ◽

Toshiro Itani

Keyword(s):

Pattern Formation ◽

In Situ Analysis ◽

Dissolution Process

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In-situ analysis of the structural formation process of liquid–crystalline epoxy thermosets by simultaneous SAXS/WAXS measurements using synchrotron radiation

Polymer Journal ◽

10.1038/pj.2012.196 ◽

2012 ◽

Vol 45 (1) ◽

pp. 43-49 ◽

Author(s):

Miyuki Harada ◽

Junichiro Ando ◽

Seiya Hattori ◽

Shinichi Sakurai ◽

Naoki Sakamoto ◽

...

Keyword(s):

Synchrotron Radiation ◽

Formation Process ◽

Liquid Crystalline ◽

In Situ Analysis ◽

Structural Formation ◽

Liquid Crystalline Epoxy

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In situ Analysis for Initial Formation Process of Gold Nanoparticles in Discharge in Aqueous Solution

10.7567/ssdm.2007.f-7-2 ◽

2007 ◽

Author(s):

Camelia Miron ◽

Maria Antoaneta Bratescu ◽

Takahiro Ishizaki ◽

Nagahiro Saito ◽

Osamu Takai

Keyword(s):

Aqueous Solution ◽

Gold Nanoparticles ◽

Formation Process ◽

In Situ Analysis ◽

Initial Formation

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In Situ Analysis of Cellular Functional Molecules

10.1039/9781839160455 ◽

2020 ◽

Keyword(s):

In Situ Analysis

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An approach to in-situ analysis of scramjet combustor behavior

10.2514/6.1993-2328 ◽

1993 ◽

Author(s):

WILLIAM PESCHKE

Keyword(s):

In Situ Analysis ◽

Scramjet Combustor

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In Situ Analysis and Visualization with CREATE-AVTMHelios

AIAA Scitech 2021 Forum ◽

10.2514/6.2021-0943 ◽

2021 ◽

Author(s):

Andrew C. Bauer ◽

James R. Forsythe ◽

Jay Sitaraman ◽

Andrew M. Wissink ◽

Buvaneswari Jayaraman ◽

...

Keyword(s):

In Situ Analysis

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Optically accessible bench-scale fast pyrolysis reactor for in-situ analysis using Fourier transform infrared spectroscopy

10.31274/etd-180810-4710 ◽

2016 ◽

Author(s):

Eric Kok Hsien Chon

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Fourier Transform Infrared Spectroscopy ◽

Fast Pyrolysis ◽

Fourier Transform Infrared ◽

In Situ Analysis ◽

Bench Scale ◽

Pyrolysis Reactor

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Measurement of diffusion in binary nonelectrolyte solutions by the diaphragm method with in situ analysis. II. Diffusion in tetrachloromethane-benzene and benzene-cyclohexane mixtures

Collection of Czechoslovak Chemical Communications ◽

10.1135/cccc19712568 ◽

1971 ◽

Vol 36 (7) ◽

pp. 2568-2580 ◽

Author(s):

I. Samohýl

Keyword(s):

In Situ Analysis ◽

Nonelectrolyte Solutions

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How Many Microscopies Does It Take to Get to the Root Cause of the Fail? Sample Prep, Imaging, and In-Situ Analysis for Integrated Circuit Failure Analysis at the 14nm Node

Microscopy and Microanalysis ◽

10.1017/s1431927621003111 ◽

2021 ◽

Vol 27 (S1) ◽

pp. 782-783

Author(s):

Lucile C Sheridan

Keyword(s):

Failure Analysis ◽

Integrated Circuit ◽

In Situ Analysis ◽

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