A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography
2012 ◽
Vol 5
(2)
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pp. 625-651
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2019 ◽
Vol 18
(4)
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pp. 679-686
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2006 ◽
Vol 83
(4-9)
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pp. 1316-1320
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1997 ◽
Vol 15
(6)
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pp. 2417
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