Development of Metal-Organic Vapor Phase Diffusion Enhanced Selective Area Epitaxy, a Novel Metal-Organic Vapor Phase Epitaxy Selective Area Growth Technique, and Its Application to Multi-Mode Interference Device Fabrication

1999 ◽  
Vol 38 (Part 1, No. 2B) ◽  
pp. 1029-1033 ◽  
Author(s):  
Martin Bouda ◽  
Yoshiaki Nakano
Keyword(s):  
Vapor Phase ◽  
Device Fabrication ◽  
Selective Area Growth ◽  
Selective Area Epitaxy ◽  
Growth Technique ◽  
Organic Vapor ◽  
Selective Area ◽  
Metal Organic ◽  
Multi Mode ◽  
Mode Interference

Nonlinear Kinetic Analysis of InP and InAs Metal Organic Vapor Phase Epitaxy by Selective Area Growth Technique

2008 ◽  
Vol 47 (11) ◽  
pp. 8269-8274 ◽  
Author(s):  
Yunpeng Wang ◽  
Haizheng Song ◽  
Masakazu Sugiyama ◽  
Yoshiaki Nakano ◽  
Yukihiro Shimogaki
Keyword(s):  
Kinetic Analysis ◽  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Selective Area Growth ◽  
Growth Technique ◽  
Organic Vapor ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic ◽  
Nonlinear Kinetic

Selective Area Growth by Metal Organic Vapor Phase Epitaxy and Atomic Layer Epitaxy Using Ga2O3as a Novel Mask Layer

1999 ◽  
Vol 38 (Part 1, No. 3A) ◽  
pp. 1516-1520 ◽  
Author(s):  
Shingo Hirose ◽  
Akihiro Yoshida ◽  
Masaaki Yamaura ◽  
Kazuhiko Hara ◽  
Hiro Munekata
Keyword(s):  
Vapor Phase ◽  
Atomic Layer ◽  
Vapor Phase Epitaxy ◽  
Atomic Layer Epitaxy ◽  
Selective Area Growth ◽  
Organic Vapor ◽  
Mask Layer ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic

Dislocation filtering and polarity in the selective area growth of GaN nanowires by continuous-flow metal organic vapor phase epitaxy

2015 ◽  
Vol 9 (1) ◽  
pp. 015502 ◽  
Author(s):  
Pierre-Marie Coulon ◽  
Blandine Alloing ◽  
Virginie Brändli ◽  
Philippe Vennéguès ◽  
Mathieu Leroux ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Continuous Flow ◽  
Vapor Phase Epitaxy ◽  
Selective Area Growth ◽  
Organic Vapor ◽  
Gan Nanowires ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic

scholarly journals Selective area growth of AlGaN nanopyramid arrays on graphene by metal-organic vapor phase epitaxy

2018 ◽  
Vol 113 (26) ◽  
pp. 263102 ◽  
Author(s):  
A. Mazid Munshi ◽  
Dong-Chul Kim ◽  
Carl Philip Heimdal ◽  
Martin Heilmann ◽  
Silke H. Christiansen ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Selective Area Growth ◽  
Organic Vapor ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic

Examination of intermediate species in GaN metal-organic vapor-phase epitaxy by selective-area growth

2010 ◽  
Vol 7 (7-8) ◽  
pp. 2085-2087 ◽  
Author(s):  
Masakazu Sugiyama ◽  
Satoshi Yasukochi ◽  
Tomonari Shioda ◽  
Yukihiro Shimogaki ◽  
Yoshiaki Nakano
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Selective Area Growth ◽  
Intermediate Species ◽  
Organic Vapor ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic

Double-Polarity Selective Area Growth of GaN Metal Organic Vapor Phase Epitaxy by Using Carbon Mask Layers

2013 ◽  
Vol 52 (8S) ◽  
pp. 08JB26 ◽  
Author(s):  
Yohei Fujita ◽  
Yasushi Takano ◽  
Yoku Inoue ◽  
Masatomo Sumiya ◽  
Shunro Fuke ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Selective Area Growth ◽  
Organic Vapor ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic

Zn and S Doping in GaAs Selective Area Growth by Metal–Organic Vapor Phase Epitaxy

2009 ◽  
Vol 48 (3) ◽  
pp. 031101
Author(s):  
Haizheng Song ◽  
Yunpeng Wang ◽  
Masakazu Sugiyama ◽  
Yoshiaki Nakano ◽  
Yukihiro Shimogaki
Keyword(s):  
Vapor Phase ◽  
Vapor Phase Epitaxy ◽  
Selective Area Growth ◽  
Organic Vapor ◽  
Selective Area ◽  
Area Growth ◽  
Metal Organic
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