A Micromachined Millimeter-Wave Cavity Resonator on Silicon and Quartz Substrates
2001 ◽
Vol 40
(Part 2, No. 12B)
◽
pp. L1394-L1397
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2018 ◽
Vol 138
(2)
◽
pp. 129-135
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2008 ◽
Vol 56
(8)
◽
pp. 2001-2007
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2000 ◽
Vol 83
(1-3)
◽
pp. 1-5
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Keyword(s):
2007 ◽
Vol 17
(8)
◽
pp. 571-573
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