scholarly journals Robust Control Design for Vibration Isolation of an Electron Beam Projection Lithography System

2010 ◽  
Vol 49 (6) ◽  
pp. 06GE04 ◽  
Author(s):  
Fu-Cheng Wang ◽  
Min-Feng Hong ◽  
Jia-Yush Yen
Keyword(s):  
Electron Beam ◽  
Robust Control ◽  
Vibration Isolation ◽  
Control Design ◽  
Projection Lithography ◽  
Beam Projection ◽  
Robust Control Design ◽  
Lithography System

Development of data conversion system for electron beam projection lithography

2002 ◽  
Vol 20 (6) ◽  
pp. 2672 ◽  
Author(s):  
Kokoro Kato ◽  
Kuninori Nishizawa ◽  
Tamae Haruki ◽  
Tadao Inoue ◽  
Koichi Kamijo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Data Conversion ◽  
Projection Lithography ◽  
Conversion System ◽  
Beam Projection

Emulator-based control and internal model control: Complementary approaches to robust control design

Automatica ◽  
1996 ◽  
Vol 32 (8) ◽  
pp. 1223-1227 ◽  
Author(s):  
Peter J. Gawthrop ◽  
Richard W. Jones ◽  
Daniel G. Sbarbaro
Keyword(s):  
Robust Control ◽  
Internal Model ◽  
Control Design ◽  
Internal Model Control ◽  
Model Control ◽  
Robust Control Design

MRCD: a genetic algorithm for multiobjective robust control design

2002 ◽  
Vol 15 (3-4) ◽  
pp. 285-301 ◽  
Author(s):  
Alberto Herreros ◽  
Enrique Baeyens ◽  
José R. Perán
Keyword(s):  
Genetic Algorithm ◽  
Robust Control ◽  
Control Design ◽  
Robust Control Design
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