EB Stepper-A High Throughput Electron-Beam Projection Lithography System

2000 ◽  
Vol 39 (Part 1, No. 12B) ◽  
pp. 6897-6901 ◽  
Author(s):  
Takeshi Yamaguchi
Keyword(s):  
Electron Beam ◽  
High Throughput ◽  
Projection Lithography ◽  
Beam Projection ◽  
Lithography System

Development of data conversion system for electron beam projection lithography

2002 ◽  
Vol 20 (6) ◽  
pp. 2672 ◽  
Author(s):  
Kokoro Kato ◽  
Kuninori Nishizawa ◽  
Tamae Haruki ◽  
Tadao Inoue ◽  
Koichi Kamijo ◽  
...  
Keyword(s):  
Electron Beam ◽  
Data Conversion ◽  
Projection Lithography ◽  
Conversion System ◽  
Beam Projection

High-Speed Proximity Effect Correction System for Electron-Beam Projection Lithography by Cluster Processing

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3827-3832 ◽  
Author(s):  
Kozo Ogino ◽  
Hiromi Hoshino ◽  
Yasuhide Machida ◽  
Morimi Osawa ◽  
Hiroshi Arimoto ◽  
...  
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
High Speed ◽  
Projection Lithography ◽  
Beam Projection ◽  
Proximity Effect Correction ◽  
Correction System

Stencil Mask Technology for Electron-Beam Projection Lithography

2003 ◽  
Vol 42 (Part 1, No. 6B) ◽  
pp. 3811-3815 ◽  
Author(s):  
Isao Amemiya ◽  
Hiroshi Yamashita ◽  
Sakae Nakatsuka ◽  
Tadashi Sakurai ◽  
Ikuru Kimura ◽  
...  
Keyword(s):  
Electron Beam ◽  
Projection Lithography ◽  
Stencil Mask ◽  
Beam Projection

Stitching accuracy measurement system for EB direct writing and electron-beam projection lithography (EPL)

2001 ◽  
Author(s):  
Takao Tamura ◽  
Takahiro Ema ◽  
Hiroshi Nozue ◽  
Tamoya Sugahara ◽  
Akio Sugano ◽  
...  
Keyword(s):  
Electron Beam ◽  
Measurement System ◽  
Direct Writing ◽  
Accuracy Measurement ◽  
Projection Lithography ◽  
Beam Projection

High-throughput NGL electron-beam direct-write lithography system

2000 ◽  
Author(s):  
N. William Parker ◽  
Alan D. Brodie ◽  
John H. McCoy
Keyword(s):  
Electron Beam ◽  
High Throughput ◽  
Direct Write ◽  
Lithography System
Sign in / Sign up

Export Citation Format

Share Document